Use this url to cite Standard: https://hdl.handle.net/20.500.12512/205818
Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
ID
660243
Reference
ISO 14706:2014
Original Reference
ISO 14706:2014
Title
Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Contributor
Lietuvos standartizacijos departamentas
Date Issued
2014-07-25
Technical Committee
ISO Tarptautinė standartizacijos organizacija
Foreign Technical Committee
ISO/TC 201
Subject
| No | Subject |
|---|---|
71.040.40 | Cheminė analizė |
Document
| Document | Language | Pages |
|---|---|---|
en | 25 |
Active
Taip / Yes
Date of Submission
2024-02-22