Use this url to cite Standard: https://hdl.handle.net/20.500.12512/230979
Surface chemical analysis — Depth profiling — Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
ID
717349
Reference
ISO 23170:2022
Original Reference
ISO 23170:2022
Title
Surface chemical analysis — Depth profiling — Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
Contributor
Lietuvos standartizacijos departamentas
Date Issued
2022-06-15
Technical Committee
ISO Tarptautinė standartizacijos organizacija
Foreign Technical Committee
ISO/TC 201/SC 4
Subject
No | Subject |
---|---|
71.040.40 | Cheminė analizė |
Document
Document | Language | Pages |
---|---|---|
en | 29 |
Active
Taip / Yes
Date of Submission
2024-02-22