Use this url to cite Standard: https://hdl.handle.net/20.500.12512/202917
Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
ID
657463
Reference
ISO/TR 19319:2013
Original Reference
ISO/TR 19319:2013
Title
Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Contributor
Lietuvos standartizacijos departamentas
Date Issued
2013-03-06
Technical Committee
ISO Tarptautinė standartizacijos organizacija
Foreign Technical Committee
ISO/TC 201/SC 2
Subject
No | Subject |
---|---|
71.040.40 | Cheminė analizė |
Document
Document | Language | Pages |
---|---|---|
en | 116 |
Active
Taip / Yes
Date of Submission
2024-02-22